Characterization of random rough surfaces by in-plane light scattering
نویسندگان
چکیده
The reciprocal space structures of Si backside rough surfaces were studied using an in-plane light scattering technique. A diode array detector was used to collect the angular distribution of the scattered intensity. The diffraction profiles are interpreted based on the theory of diffraction from a self-affine rough surface. Roughness parameters such as interface width, lateral correlation length, and the roughness exponent, are extracted from the profiles and are compared to that obtained by real space imaging techniques such as atomic force microscopy and stylus profilometry. Factors that limit the accuracy of light scattering measurements are discussed. © 1998 American Institute of Physics. @S0021-8979~98!08817-3#
منابع مشابه
Sea Surfaces Scattering by Multi-Order Small-Slope Approximation: a Monte-Carlo and Analytical Comparison
L-band electromagnetic scattering from two-dimensional random rough sea surfaces are calculated by first- and second-order Small-Slope Approximation (SSA1, 2) methods. Both analytical and numerical computations are utilized to calculate incoherent normalized radar cross-section (NRCS) in mono- and bi-static cases. For evaluating inverse Fourier transform, inverse fast Fourier transform (IFFT) i...
متن کاملStudy on the Light Scattering from Random Rough Surfaces by Kirrhoff Approximation
In order to study the space distribution characteristics of light scattering from random rough surfaces, the linear filtering method is used to generate a series of Gaussian randomly rough surfaces, and the Kirchhoff Approximation is used to calculate the scattered light intensity distribution from random metal and dielectric rough surfaces. The three characteristics of the scattered light inte...
متن کاملNumerical Analysis of Electromagnetic Scattering from a Dielectric Rough Surface Cylinder
1.Introduction The wave scattering from rough surfaces is an important problem which closely relates to the measurement technology or diagnosing techniques by using microwave, millimeter wave, light wave or acoustic wave (1). Various kinds of theoretical models and methods for analyzing the wave scattering from random rough surfaces have been proposed so far. However, they have often used appro...
متن کاملExperimental study of enhanced backscattering from one- and two-dimensional random rough surfaces
The phenomenon of light scattering from rough surfaces (random or otherwise) has attracted much attention, both experimentally and theoretically. This subject is of particular importance in areas that involve using a wave, either acoustic or electromagnetic, as a probe to observe material and surface properties, e.g., interpretation of radar returns (from the surface of the Earth as well as fro...
متن کاملRoughness characterization of well-polished surfaces by measurements of light scattering distribution
According to vector scattering and scalar scattering theory, the relationship of BRDF (bidirectional reflectance distribution function) of light scattering from micro-rough surface with TIS (total integrated scattering) is analyzed. Roughness statistical characterization such as RMS (root mean square), PSD (power spectral density) function are deduced by TIS of polished surface. Based on the li...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 1998